Figure 2

Microscopic switching mechanism.
(a) Cross section TEM of the PCM device highlighting the region investigated for elemental analysis after bipolar reset. (b,c,d) EDX profiles of Ge, Sb and Te, respectively, showing local depletion of Ge and Sb in correspondence of the BE. (e,f,g) Pictorial view of the elemental profile in the initial set state (e), after bipolar reset inducing ionic migration and species separation causing local depletion at the BE interface (f) and after bipolar set responsible for redistribution of the chemical elements within the GST volume.