Figure 2

Nanobeam electron diffraction (NBED) and pair distribution function (PDF) analysis of the barrier oxide.
(a) A typical NBED pattern of the AlOx barrier. It includes contributions from the adjacent crystalline Al as evidenced by the Bragg spots from Al. Diffused and speckle intensities are from the amorphous barrier oxide. (b) pair distribution function obtained from a set of NBED data. Peaks P1-P6 are identified as the attributes of interatomic pair distances, involving both the AlOx barrier (in red) and crystalline Al layers (in blue).