Table 3 MOS Sensor name.
Chamber | Number | Sensor |
---|---|---|
Chamber CL | 1 | LY2/LG |
2 | LY2/G | |
3 | LY2/AA | |
4 | LY2/GH | |
5 | LY2/gCTL | |
6 | LY2/gCT | |
Chamber A | 7 | T30/1 |
8 | P10/1 | |
9 | P10/2 | |
10 | P40/1 | |
11 | T70/2 | |
12 | PA2 | |
Chamber B | 13 | P30/1 |
14 | P40/2 | |
15 | P30/2 | |
16 | P40/2 | |
17 | T40/1 | |
18 | TA2 |
Chamber | Number | Sensor |
---|---|---|
Chamber CL | 1 | LY2/LG |
2 | LY2/G | |
3 | LY2/AA | |
4 | LY2/GH | |
5 | LY2/gCTL | |
6 | LY2/gCT | |
Chamber A | 7 | T30/1 |
8 | P10/1 | |
9 | P10/2 | |
10 | P40/1 | |
11 | T70/2 | |
12 | PA2 | |
Chamber B | 13 | P30/1 |
14 | P40/2 | |
15 | P30/2 | |
16 | P40/2 | |
17 | T40/1 | |
18 | TA2 |