Figure 5
From: Large area and deep sub-wavelength interference lithography employing odd surface plasmon modes
(a) SEM picture of Au grating SPP modes excitation. (b) AFM measured surface morphology of Au grating after TS processing, RMS 0.4 nm. (c) Cross section picture of SPP interference structure. (d) Odd SPP modes interference lithography patterns with 45 nm half pitch.
