Figure 2

Design and working mechanism of the biomimetic MEMS artificial hair cell sensor.
(a) Angled side-view and top-view of the graded height and geometrical dimensions of PDMS pillars within a MEMS bundle. (b–d) Schematics illustrating the necessity of height gradation in the design of pillar bundle and the directional dependence of the output, for different directions of flow along the bundle’s axis. (e) A schematic showing the flow sensing mechanism in the presence of an oscillating dipole.