Figure 3
Mobility vs. n of the deposited Superlattices.
Modulation in the (a) mobility and (b) conductivity of the superlattices plotted against their refractive index at hν = 2 eV (λ = 620 nm). Results for cation substituted Zn1−xMgxO:Al are included for comparison. (■) a-IGZO/SiOx superlattices on glass substrate, (□) a-IGZO/SiOx superlattices on Al2O3, (
) ZnO:Al/SiOx superlattices, (
) Zn1−xMgxO:Al grown by spray pyrolysis from Fleischer et al.7.
