Figure 4

Refractive index of the superlattices.
Dielectric functions of the (a) a-IGZO/SiOx and (b) ZnO:Al/SiOx superlattices. (–) bulk film, () 10/2.5 nm, (
) 10/5 nm, (
) 10/7.5 nm, (
) 10/10 nm.
Refractive index of the superlattices.
Dielectric functions of the (a) a-IGZO/SiOx and (b) ZnO:Al/SiOx superlattices. (–) bulk film, () 10/2.5 nm, (
) 10/5 nm, (
) 10/7.5 nm, (
) 10/10 nm.