Figure 4 | Scientific Reports

Figure 4

From: Optimized holographic femtosecond laser patterning method towards rapid integration of high-quality functional devices in microchannels

Figure 4

Rapid integration of microtraps and identification of microdevice in a microchannel.

(a) The schematic diagrams of fabrication process (i) Preparation of micro-fluidic channel by UV lithography; (ii) surface coating with photoresist of SZ2080; (iii) single exposure fabrication of trap array and information of microdevice; (iv) covering of the device with PDMS slab. (b) The capture process. (c) The SEM image of integrated microdevice. (d–f) The details of traps, QR code and letters. Scale bars are 25 μm in (c), 10 μm in (d–f).

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