Table 1 Summary of the device electrical parameters, including μFET, on/off ratio, Von, SS, and Nmax for a-IGZO TFTs (sample numbers 1~18).
From: Electric Field-aided Selective Activation for Indium-Gallium-Zinc-Oxide Thin Film Transistors
# | Sample | Annealing temperature [°C] | VG [V] | VS [V] | VD [V] | ∆Tmax [°C] | μFET [cm2 V−1 s−1] | Ion/off ratio | Von [V] | SS [V decade−1] | Nmax [cm−3] |
|---|---|---|---|---|---|---|---|---|---|---|---|
1 | TAT, reference | 280 | — | — | — | — | 9.90 | 5.09 * 108 | −0.6 | 0.42 | 1.09 * 1012 |
2 | VG (−50) VDS (0)_1 | 130 | −50 | 0 | 0 | 0 | — | 1.83 * 101 | — | — | — |
3 | VG (−50) VDS (0)_2 | 130 | −50 | +50 | +50 | 0 | — | 1.64 * 101 | — | — | — |
4 | VG (−50) VDS (−50) | 130 | −50 | 0 | −50 | 13 | 8.08 | 5.79 * 101 | −1.6 | 6.30 | 1.88 * 1013 |
5 | VG (−50) VDS (+50) | 130 | −50 | 0 | +50 | 11 | 10.68 | 3.89 * 101 | −6.4 | 9.12 | 2.74 * 1013 |
6 | VG (−50) VDS (+100) | 130 | −50 | −50 | +50 | 38 | 8.97 | 2.15 * 104 | −1.4 | 1.02 | 2.89 * 1012 |
7 | VG (0) VDS (0)_1 | 130 | 0 | −50 | −50 | 0 | — | 1.07 * 101 | — | — | — |
8 | VG (0) VDS (0)_2 | 130 | 0 | +50 | +50 | 0 | — | 1.05 * 101 | — | — | — |
9 | VG (0) VDS (−50) | 130 | 0 | 0 | −50 | 49 | 13.75 | 1.81 * 108 | −3.4 | 0.59 | 1.59 * 1012 |
10 | VG (0) VDS (+50) | 130 | 0 | 0 | +50 | 39 | 8.91 | 1.31 * 105 | −2.2 | 0.82 | 2.30 * 1012 |
11 | VG (0) VDS (+100) | 130 | 0 | −50 | +50 | 58 | 11.14 | 1.26 * 108 | −3.2 | 0.58 | 1.57 * 1012 |
12 | VG (+50) VDS (0)_1 | 130 | +50 | −50 | −50 | 0 | — | 1.09 * 101 | — | — | — |
13 | VG (+50) VDS (0)_2 | 130 | +50 | 0 | 0 | 0 | — | 8.02 | — | — | — |
14 | VG (+50) VDS (−50) | 130 | +50 | 0 | −50 | 54 | 10.66 | 3.18 * 108 | −0.2 | 0.36 | 9.00 * 1011 |
15 | VG (+50) VDS (+50) | 130 | +50 | 0 | +50 | 49 | 11.23 | 7.19 * 107 | −1.4 | 0.49 | 1.30 * 1012 |
16 | VG (+50) VDS (+100) | 130 | +50 | −50 | +50 | 57 | 11.87 | 6.23 * 107 | −2.4 | 0.55 | 1.49 * 1012 |
17 | VG (+50) VDS (−50)_0.5 h | 130 | +50 | 0 | −50 | 54 | — | 9.65 | — | — | — |
18 | VG (+50) VDS (−50)_2 h | 130 | +50 | 0 | −50 | 54 | 12.00 | 2.46 * 108 | 0.2 | 0.36 | 8.92 * 1011 |
