Figure 1
From: Electrostatic repulsive out-of-plane actuator using conductive substrate
Various repulsive actuators.
The solid rectangle AT is the attracting electrode, the fixed hollow rectangle SU is the suppressing electrode, and the third hollow rectangle AC is the actuated electrode. (a) Levitation of comb-drive actuators. (b) In-plane repulsive actuator proposed by Lee et al.20. The movement direction of AC is restricted to either left or right. (c) Out-of-plane repulsive actuator proposed by He et al.21. (d) Three-layered repulsive actuator proposed by Rezadad et al.23.
