Table 1 Physical parameters of 19-element DM.
From: Electrostatic repulsive out-of-plane actuator using conductive substrate
Symbol | Quantity | Value |
|---|---|---|
W | width of mirror segment | 600 μm |
L | length of movable electrode | 620 μm |
W e | width of movable electrode | 9 μm |
W U | width of unaligned fixed electrode | 11 μm |
W A | width of aligned fixed electrode | 11 μm |
T | thickness of movable electrode | 2 μm |
H init | initial height between movable and aligned fixed electrodes | 2 μm |
G | gap between the fixed electrodes and substrate | 600 nm |
W g | gap between the adjacent fixed electrodes | 3 μm |
E | Young’s modulus of the beam | 160 GPa |
