Figure 7
From: High-quality AlN epitaxy on nano-patterned sapphire substrates prepared by nano-imprint lithography
The fabrication process flow to obtain nano-patterned sapphire substrate by nano-imprint lithography.
Figure 7 | Scientific Reports
From: High-quality AlN epitaxy on nano-patterned sapphire substrates prepared by nano-imprint lithography
The fabrication process flow to obtain nano-patterned sapphire substrate by nano-imprint lithography.
