Table 1 Binding energies and relative peak areas of V species in VO−MO thin films evaluated from XPS studies.
Details of VO-MO films grown at different conditions | V species | Binding energy of V2p3/2 (eV) | Relative peak area (%) |
|---|---|---|---|
130 nm/200 W (As-deposited) | V3+ | 515.4 | 13 |
V4+ | 516.3 | 31 | |
V5+ | 517.3 | 56 | |
130 nm/200 W (Annealed) | V3+ | 515.6 | 24 |
V4+ | 516.3 | 50 | |
V5+ | 517.4 | 26 | |
475 nm/600 W (As-deposited) | V3+ | 515.5 | 14 |
V4+ | 516.5 | 38 | |
V5+ | 517.1 | 48 | |
475 nm/600 W (Annealed) | V3+ | 515.3 | 29 |
V4+ | 516.4 | 44 | |
V5+ | 517.1 | 27 |
