Table 1 Implantation details.

From: Super-enhancement of 1.54 μm emission from erbium codoped with oxygen in silicon-on-insulator

Erbium

Oxygen

Energy (MeV)

Dose (1013 cm−2)

Energy (keV)

Dose (1013 cm−2)

1.50

16.0

15

4.0

1.00

10.0

45

9.0

0.65

7.5

100

15.0

0.40

5.0

200

27.0

0.25

3.3

  
  1. Erbium and oxygen implanted doses and energies for the 1 × 1019 ion cm−3 volume concentration.
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