Figure 1

Schematic representing the combined methodology to deposit TiO2 materials with a multi-scale porosity.
(a) Left panel: nano-porosity expected by the Thornton’s model; right panel; meso-porosity achieved by a combination of shadowing effects plus local oxidation. The seeds are formed at the early stages of the deposition process. (b) Customized Sputtering system which allows working in a separated-charged-species regime combined with shadowing effects. θ is the inclination angle of the source. The inset is a picture of the double plasma (cyan = metallic and violet = oxidizing) established inside the chamber.