Table 1 Porosity calculated by Ellipsometric measurements.
Parallel plate geometry | Grazing incidence geometry assisted by local oxidation | ||||
---|---|---|---|---|---|
As deposited | Annealed at 500 °C | As deposited | Annealed at 500 °C | Annealed at 500 °C + N-719 | |
Refractive index at 550 nm | 2.22 | 2.30 | 2.13 | 2.05 | 2.22 |
Porosity (%) | 34 | ≤21 | 41 | 41 | 28 |