Table 1 Comparison of the mechanical properties and atomic structure of three silicon samples.

From: Effect of crystal plane orientation on tribochemical removal of monocrystalline silicon

Sample

Si(100)

Si(110)

Si(111)

Elastic modulus (GPa)

130

169

188

Hardness (GPa)

11.3

13.0

13.2

Atomic planar density (1/a2)

2.0

2.83

2.3

Double layer thickness (Å)

2.72

3.84

3.13

  1. (a is the lattice constant of silicon, 0.543 nm).
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