Table 2 Sheet resistance of silicon samples.

From: Controlled doping by self-assembled dendrimer-like macromolecules

 

Blank Sample

UA Sample

2 Days

11 Days

Measured Sheet Resistance (Rm)

199.8 kΩ

126.0 kΩ

66.7 kΩ

29.4 kΩ

Calculated Sheet Resistance (Rs) of Dopants/Contaminations

388.9 kΩ

341.2 kΩ

100.1 kΩ

34.5 kΩ