Table 1 Tunability of the center frequency and bandwidth by the electrothermal voltage.

From: Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters

VTh [V]

1.769

1.8322

1.848

f0 [kHz]

86.760

88.125

88.25

Δf [kHz]

9

10.25

11

Back to article page