Figure 9: Schematic of the processes for fabricating quasi-3D bowtie nanoantennas.
From: Metamaterial study of quasi-three-dimensional bowtie nanoantennas at visible wavelengths

(a) Laser irradiation. (b) Wet etching process. (c) PS spheres self-assembled on the substrate. (d) PS etching process. (e) Deposit metal film on the substrate. (f) PS sphere removal.