Figure 4

(a) Optical microscope image of air-gapped bridges, (b) three-dimensional image of air-gapped bridges, and (c) height profiles of cross sections indicated by the solid line in (b).

(a) Optical microscope image of air-gapped bridges, (b) three-dimensional image of air-gapped bridges, and (c) height profiles of cross sections indicated by the solid line in (b).