Figure 1
From: Internal stress induced natural self-chemisorption of ZnO nanostructured films

(a) XRD patterns for the samples Z125, Z150 and Z175, respectively. (b) The corresponding slow scan curves of the ZnO (002) peak in the θ-2θ scan ranged from 2θ = 33 to 35.5°. (c) Lattice constants and the internal stress of the samples as a function of sputtering power.