Figure 7: Fabrication of capped aluminum nanoslits using hot embossing nanoimprint lithography and thermal evaporation.
From: Highly Sensitive Aluminum-Based Biosensors using Tailorable Fano Resonances in Capped Nanostructures
(a) A process flowchart for the fabrication of capped aluminum nanoslits. (b) The optical image of the replicated nanostructure arrays on an A4 size polycarbonate film. There are 416 arrays and the area of each periodic nanostructure is 5 × 5 mm2. (c) The scanning electron microscope (SEM) images of the capped aluminum nanoslits with different ridge heights. (d) The atomic force microscopy images of the capped aluminum nanoslits with different ridge heights. (e) The cross-sectional profiles of the capped aluminum nanoslits. The ridge heights range from 35 to 75 nm.
