Figure 2: Morphological evolution of GaN grown on PSS with thickness of approximately 30, 300, 700, and 1000 nm, respectively.

(a–d) Top-view SEM images of GaN grown on PSS without NL. (e–h) Top-view SEM images of GaN grown on PSS with GaN NL. (i–l) Top-view SEM images of GaN grown on PSS with AlGaN NL. (m–p) Top-view SEM images of GaN grown on PSS with sputtered AlN NL.