Figure 4: Cross-sectional TEM images of UV LEDs grown on PSS with GaN/AlGaN/sputtered AlN NLs.

Bright-field TEM images of UV LED grown on PSS with (a) GaN NL, (d) AlGaN NL, and (g) sputtered AlN NL, zone axis GaN []. Bright-filed TEM images of UV LED with (b) GaN NL, (e) AlGaN NL, and (h) sputtered AlN NL when g = 0002. Bright-filed TEM images of UV LED with (c) GaN NL, (f) AlGaN NL, and (i) sputtered AlN NL when g =
.