Figure 6

XRD ω-rocking scans of (a) symmetric (002) and (b) asymmetric (102) for UV LEDs grown on PSS with various sputtered AlN NL thicknesses.
XRD ω-rocking scans of (a) symmetric (002) and (b) asymmetric (102) for UV LEDs grown on PSS with various sputtered AlN NL thicknesses.