Figure 2: AFM and plan-view TEM images of GaN templates on sapphire and silicon substrates.

AFM images of a GaN template on (a) sapphire (TDD: 3.8 × 108 cm−2) and (b) silicon (TDD: 5.3 × 108 cm−2). Plan-view TEM images of a GaN template on (a) sapphire and (b) silicon. The scale bar of both AFM and plan-view TEM images is 0.5 μm.