Figure 6
(a) The main fabrication process of the inertial microswitch; (b) The SEM micrographs of the fabricated inertial microswitch; (c,d) Its close-ups.
Figure 6 | Scientific Reports
(a) The main fabrication process of the inertial microswitch; (b) The SEM micrographs of the fabricated inertial microswitch; (c,d) Its close-ups.
