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Nature Nanotechnology (1)

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Step engineering for nucleation and domain orientation control in WSe₂ epitaxy on c-plane sapphire

Surface chemistry controls the location of WSe₂ nucleation on a stepped sapphire substrate. Preferential nucleation at either the top or bottom step edge can be used to minimize mirror twin domains and produce unidirectional WSe₂ monolayers.

Haoyue Zhu
Nadire Nayir
Joan M. Redwing
Research27 Jul 2023
Nature Nanotechnology

Volume: 18, P: 1295-1302

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Step engineering for nucleation and domain orientation control in WSe2 epitaxy on c-plane sapphire

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Step engineering for nucleation and domain orientation control in WSe₂ epitaxy on c-plane sapphire