The growth of wafer-scale single-crystalline 2D semiconductors on sapphire is important for their electronic applications, but the underlying mechanisms are not yet fully understood. Here, the authors study the influence of air-induced sapphire surface hydrolysis on the growth process of 2D WS2 and propose an ultraviolet light healing method to repair the degraded substrates.
- Wei Fu
- Jianwei Chai
- Kuan Eng Johnson Goh
