Solid-phase crystallized Ce and H codoped In2O3 (ICO:H) transparent conducting films achieve very high electron mobility values of over 100 cm2/Vs and suitable low-carrier concentration, leading to high electrical conductivity and broadband optical transparency. However, a high-temperature annealing process for solid-phase crystallization is necessary to obtain high mobility. Therefore, such a high processing temperature limits the formation and adoption of these films on heat-sensitive flexible substrates. Herein, we used excimer laser irradiation to achieve an ICO:H film on flexible polyethylene terephthalate that had ultrahigh mobility of 133 cm2/Vs, which is the highest among those reported for flexible transparent electrodes.
- Junichi Nomoto
- Takashi Koida
- Tetsuo Tsuchiya