Chemical vapor deposition (CVD) is a versatile method to synthesize 2D materials, but usually requires high growth temperatures. Here, the authors report a BiOCl-assisted CVD approach to grow 2D nanosheets from 27 different layered and nonlayered materials at temperatures <500 °C, which are compatible with back-end-of-the-line industrial processes.
- Biao Qin
- Muhammad Zeeshan Saeed
- Xidong Duan