Hexagonal boron nitride (hBN) is a layered van der Waals material showing promise for nanophotonics. Here, the authors design hBN photonic crystal cavities with quality factors exceeding 2000, and further demonstrate deterministic tuning of individual cavities by minimally-invasive electron beam induced etching.
- Sejeong Kim
- Johannes E. Fröch
- Igor Aharonovich