A universal process for transferring planar, transparent functional oxide thin films on to elastomeric polydimethylsiloxane (PDMS) substrates is demonstrated. This overcomes the challenge of incorporating high-temperature-processed crystalline oxide materials with low-temperature organic substrates. The process is demonstrated using indium tin oxide (ITO) thin films to realise fully transparent and flexible resistors and zinc oxide thin films. The ITO thin films on PDMS are shown to withstand uniaxial strains of 15%, enabled by microstructure tectonics. This ubiquitous process will pave the way for touch sensing and energy harvesting for displays and electronics with flexible and transparent characteristics.
- Philipp Gutruf
- Charan M Shah
- Madhu Bhaskaran