Aromatic sulfonate esters as acid amplifiers were introduced into a photosensitive polyetherimide system on the basis of reaction development patterning (RDP), composed of polyetherimide and a diazonaphthoquinone (DNQ) as a photosensitive agent. The resulting chemically amplified RDP (CARDP) system enabled positive-tone pattern formation with a reduced amount of the photosensitive agent and exposure dose. In particular, the use of 2SCE resulted in the formation of clear patterns with 5wt% of the photosensitive agent with a sensitivity of 125mJ/cm2. The patterns prepared by CARDP showed good thermal properties.
- Xu Cheng
- Akio Takahashi
- Toshiyuki Oyama
