van der Waals dielectric materials are required to promote the industrialization of miniaturized 2D electronics. Here, the authors report the growth of GdOCl single crystals with a dielectric constant of 15.3 and equivalent oxide thickness down to 1.3 nm, showing their application for the realization of high-performance 2D MoS2 transistors.
- Weiting Xu
- Jiayang Jiang
- Shengxue Yang
