Fig. 1: Schematic representation of the experimental setup for SCOM, which has been installed on an IBF system. | Light: Science & Applications

Fig. 1: Schematic representation of the experimental setup for SCOM, which has been installed on an IBF system.

From: Speckle-based curvature optical metrology

Fig. 1: Schematic representation of the experimental setup for SCOM, which has been installed on an IBF system.The alternative text for this image may have been generated using AI.

a The top view of a 3D model of the system, where SUT can be translated between ion source and SCOM, and the curvature measurement can be carried out before and after the IBF process. The SCOM is mounted on a fixed platform and detected the speckled signal from one angled viewport once the SUT has been transferred to SCOM position. b The optical schematic representation of the SCOM setup for 2D surface curvature measurement of a SUT. c The acquired stack of speckle images in Cartesian coordinates

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