Table 1 Summary of the key specifications of several mirror-surface metrology techniquesa
Method | FI | RADSI | CGH | NOM/LTP | SAM | SCOM |
1D/2D | 2D | 2D | 2D | 1D | 1D/2D | 2D |
Measurement Type | Height | Height | Height | Slope | Slope/Curvature | Curvature |
Radius of Curvature Range | >0.5 m | >1 m | >few mm | >1–5 m | >50–200 mm | >50–200 mm |
Field of View | 100–300 mm | 100–300 mm | 100–300 mm | 1–2.5 mm | 2-3 mm | 20–30 mm |
Lateral/Spatial Resolution | ~35–50 µm | ~35–50 µm | ~35–50 µm | 1000–2000 µm | 100–300 µm | 100–300 µm |
Repeatability (rms) | 0.1–2 nm | 0.5–3 nm | 1–5 nm | 0.5–5 nm | 0.5–5 nm | 5–25 nm |
Acquisition Time | 3 h | 4 h | 3 h | 1 h | 1 h | 3.5 h |
Data Processing Time | 0.5 h | 1 h | 3 h | <0.1 h | 0.5 h | 2 h |
Portability | Low | Low | Low | Medium | High | High |
