Fig. 2: Fabrication process of the stepped piezo-cantilever resonator. | Microsystems & Nanoengineering

Fig. 2: Fabrication process of the stepped piezo-cantilever resonator.

From: Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids

Fig. 2: Fabrication process of the stepped piezo-cantilever resonator.The alternative text for this image may have been generated using AI.

a Making marks by RIE; b thermal oxidization process; c Mo layer sputtering; d RMS AlN deposition; e top Cr/Au electrode sputtering; f LPCVD SiO2 passivation; g via dry etching to expose the bottom electrode; h the wire fabrication by lift-off process; i backside DRIE; and j DRIE releasing the cantilever.

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