Fig. 3: Modal verification of the out-of-plane modes of the cantilever. | Microsystems & Nanoengineering

Fig. 3: Modal verification of the out-of-plane modes of the cantilever.

From: Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids

Fig. 3: Modal verification of the out-of-plane modes of the cantilever.The alternative text for this image may have been generated using AI.

a The frequency responses consist of the deflection (left axis, lower curve) and output voltage (right axis, upper curve). b Difference between the analytical and simulated results of the resonant frequency under 2nd flexural mode. c The correction factor of the analytical resonant frequency as a function of the W2/W1. d Comparison of the resonant frequencies of stepped piezo-cantilever resonator under different vibration modes and in different liquids measured by analytical, simulated and experimental methods.

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