Table 3 Values of the calibration coefficients for different stepped piezo-cantilever resonators

From: Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids

 

χ1(cP·Hz3 kg m−3 × 1017)

χ2(Hz2 kg m-3)

Sc

Rectangular, 2nd

6.331

35.997

/

Rectangular, 3rd

89.641

37.106

/

Trapezoidal, 2nd

5.815

12.850

1.669

Trapezoidal, 3rd

430.539

78.723

1.258

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