Fig. 9: Recent progress of three-level MEMS mirrors based on piezoelectric AlScN. | Microsystems & Nanoengineering

Fig. 9: Recent progress of three-level MEMS mirrors based on piezoelectric AlScN.

From: Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping

Fig. 9: Recent progress of three-level MEMS mirrors based on piezoelectric AlScN.The alternative text for this image may have been generated using AI.

a A water-immersible two-axis MEMS mirror designed for photoacoustic and ultrasound imaging, integrating a honeycomb-reinforced mirror to suppress cavitation and enhance structural stability during immersion117. b A multi-degree-of-freedom MEMS mirror featuring a vertically assembled 5 mm square mirror and concealed S-shaped actuators, enabling independent tip, tilt, and piston control with high fill factor and optical efficiency118. c A fast steering mirror optimized for free-space optical communication, employing rib-reinforced AlScN-actuated beams to enhance resonant stiffness and achieve sub-millisecond response through double-step driving119. d A compact FSM designed for laser inter-satellite links, integrating a stress-enhanced piezoresistive sensor for in-situ angular feedback, supporting precise beam control with sub-microradian resolution and low surface deformation120

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