Fig. 13: Mode localized MEMS electric field sensor.
From: Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review
a Schematic of the mode localized electric field sensor when external electric field applied149. b A SEM image of the fabricated electric field sensor. c Frequency responses of the electrostatic resonator 1 when an external electric field of various sizes enters up to 7 kV/m
