Fig. 2: Mechanical characterization.

a Definition of the coordinate system (x–z) and magnetic field (H) angle θ. b Calculated magnetic torque produced on the ferromagnetic element of serpentine (red line) and straight actuator (black line) under 15 mT at different field angles. c Finite element analysis of stress distribution on cantilevers’ surfaces under 0.1 mN load at the tip. d Maximum calculated deflection under loading condition (0.01–0.1 mN) for both cantilever types from finite element simulation. e Maximum calculated stress under various deflection conditions for both cantilever types from finite element simulation. f Static deflection angle prediction and measurements for the serpentine and the straight flexures. Each data point represents a different experiment using an independent sample. Data are expressed as mean ± standard deviation (n = 3).