Table 1 Parameters of the sensor system used for modelling
Variable | Value |
|---|---|
Width of beam, wSi | 150 μm |
Length of beam, lSi | 350 μm |
Thickness of beam, dSi | 1.25–1.45 μm |
Frequency of beam, f | [14.2, 13.92, 12.75] kHz |
Density of silicon, ρSi | 2,329 kg m−3 |
Elastic modulus of silicon, ESi | 170 GPa |
Heater resistance, R | [25.0, 20.5, 20.5] Ω |
Calibration factor, k (piezo-resistive sensing and pre-amplification) | [1.00, 0.80, 0.25] × 106 V m−1 |
Time constant of high-pass filter, τ | 10−3 s |
Transfer factor, α (temperature to deflection) | 749.3702 m2 s−2 K−1 |
Time constant, β (temperature change) | 1.0066 × 103 s−1 |
Transfer factor, γ (voltage to temperature) | 4.2588 × 107 K Ω2 s−1 V−2 |
Mode factor δ1 for frequency calculation | 1.8751 |
Density of air, ρgas | 1.189 kg m−3 |
Dynamic viscosity of air, ηgas | 18.232 × 10−6 Pa s |
