The excimer laser is synonymous with precision. Today it is enabling the production of integrated circuits and nextgeneration displays, as well as new breakthroughs in eye surgery.
This is a preview of subscription content, access via your institution
Access options
Subscribe to this journal
Receive 12 print issues and online access
$259.00 per year
only $21.58 per issue
Buy this article
- Purchase on SpringerLink
- Instant access to full article PDF
Prices may be subject to local taxes which are calculated during checkout
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Delmdahl, R. Precision engineering. Nature Photon 4, 286 (2010). https://doi.org/10.1038/nphoton.2010.106
Issue date:
DOI: https://doi.org/10.1038/nphoton.2010.106
This article is cited by
-
Generation of long pulse excimer laser using a novel auto pre-pulse excitation scheme
Optical and Quantum Electronics (2016)
-
Enabling laser applications in microelectronics manufacturing
Applied Physics A (2016)
-
Ultraviolet Laser Cleaning of Carbon Fiber Composites
Powder Metallurgy and Metal Ceramics (2016)
