Fig. 3: SEM surface micrographs of Al2O3/Pt films annealed in air at different temperatures.
a As-deposited. b Annealed at 650 °C. c Annealed at 750 °C. d Annealed at 850 °C. e Annealed at 950 °C
Fig. 3: SEM surface micrographs of Al2O3/Pt films annealed in air at different temperatures. | Microsystems & Nanoengineering
