Fig. 7: Performance tests of the Pt thin films. | Microsystems & Nanoengineering

Fig. 7: Performance tests of the Pt thin films.

From: Pt thin-film resistance thermo detectors with stable interfaces for potential integration in SiC high-temperature pressure sensors

Fig. 7

a Schematic diagram of the temperature–resistance test platform. b Temperature–resistance test platform built in the laboratory. c Sheet resistance and grain size D111 values of Pt thin films under different annealing temperatures. d Sheet resistance and TCR values of Pt thin films under different annealing temperatures. e–h Temperature–resistance curves and calculated TCRs of Pt thin-films annealed for 1.5 h at different annealing temperatures in air

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