Fig. 3: Frequency responses under different handlings and corresponding signal-to-bias ratios. | Microsystems & Nanoengineering

Fig. 3: Frequency responses under different handlings and corresponding signal-to-bias ratios.

From: Extracting mechanical quality factor and eliminating feedthrough using harmonics of thermal-piezoresistive micromechanical resonators

Fig. 3

a Recorded raw output amplitude–frequency responses of the TPR actuated with various currents. b Lorentz fitting curve of the frequency response with bias current equaling to 6.20 mA. c Processed amplitude-frequency spectrum with the de-embedded feedthrough cancellation method. d Comparison between the responses with and without the de-embedded feedthrough cancellation when bias current is 6.20 and 5.75 mA. Obtained frequency responses of the TPR using the second- (e) and the third- (f) order harmonic components to demodulate the mixing signals. The nonlinearity begins at the current of 6.30 mA and the corresponding signal generates in the response demodulated with the third-order harmonic. g The relationships between the signal-to-bias ratio and the bias current of frequency responses recorded, calculated with the de-embedded method, and dealt with the second-order harmonics

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