Fig. 6: Experimental measurement and theoretical stimulation of Q_eff in thermal-piezoresistive pumping.

Extracted effective Q factor and the fitting curve of interrelation between effective Q factor and current of the experiment (a) together with the theoretical calculation (b). Theoretical calculation is processed on the basis of Eq. (5) combining the extracted mechanical \({Q}_{{\rm {m}}} \sim 5.8k\), and the following settings: π_l = −50 × 10−11 Pa⁻¹, α = 2.6 × 10⁻⁶ K⁻¹, E = 169 GPa, \({\omega }_{0}=2\pi \times 2.008\,{\rm{MHz}}\), ρ = 0.0018 Ω cm, the length \(L\) and cross area \(A\) of nanobeam, respectively 14.8 and 0.76 µm × 10 µm, the density of mass ρ_m = 3 g cm⁻³, the specific heat capacity c_H = 800 J kg⁻¹ K⁻¹, R_A = ρ_mL/A and C_th = c_Hρ_mLA